Measurement Technology For Micro-nanometer Devices
Books

Measurement Technology For Micro-nanometer Devices

by Wendong Zhang

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale Highlights the advanced research work from industry and academia in micro-nano devices test technology Written at both introductory and advanced levels, provides the fundamentals and theories Focuses on the measurement techniques for characterizing MEMS/NEMS devices

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Product Details

  • Number of Pages : 344
  • Publisher : John Wiley
  • Weight : 670g
  • Product Code : 9781118717967